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BS PD IEC TR 63258:2021
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  • BS PD IEC TR 63258:2021

BS PD IEC TR 63258:2021

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Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films

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Full Description

This document, which is a Technical Report, is focused on the practical protocol of ellipsometryto evaluate the thickness of nanoscale films. This document does not include any specificationof the ellipsometers, but suggests how to minimize the data variation to improve datareproducibility.

All current amendments available at time of purchase are included with the purchase of this document. See more

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